LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

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dc.authoridTANRIKULU, M. Yusuf/0000-0001-7956-1289
dc.contributor.authorPoyraz, Muhammet
dc.contributor.authorGorgulu, Kazim
dc.contributor.authorSisman, Zulkarneyn
dc.contributor.authorTanrikulu, Mahmud Yusuf
dc.contributor.authorOkyay, Ali Kemal
dc.date.accessioned2025-01-06T17:44:42Z
dc.date.available2025-01-06T17:44:42Z
dc.date.issued2017
dc.description.abstractWe propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [112M004, 112E052, 113M815, 114E645, 2228A, 2211]; TUBITAK-BIDEB for MS scholarships
dc.description.sponsorshipK.G. and Z.S. thank TUBITAK-BIDEB for MS scholarships. Funding source: Scientific and Technological Research Council of Turkey (TUBITAK) (112M004,112E052, 113M815, 114E645, 2228A, 2211).
dc.identifier.doi10.1117/1.OE.56.3.037106
dc.identifier.issn0091-3286
dc.identifier.issn1560-2303
dc.identifier.issue3
dc.identifier.scopus2-s2.0-85015781609
dc.identifier.scopusqualityQ2
dc.identifier.urihttps://doi.org/10.1117/1.OE.56.3.037106
dc.identifier.urihttps://hdl.handle.net/20.500.14669/3161
dc.identifier.volume56
dc.identifier.wosWOS:000397207200068
dc.identifier.wosqualityQ4
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherSpie-Soc Photo-Optical Instrumentation Engineers
dc.relation.ispartofOptical Engineering
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_20241211
dc.subjectuncooled infrared imaging
dc.subjectmicrobolometers
dc.subjectzinc oxide
dc.subjectatomic layer deposition
dc.titleLWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
dc.typeArticle

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