LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
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Tarih
2017
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Spie-Soc Photo-Optical Instrumentation Engineers
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Açıklama
Anahtar Kelimeler
uncooled infrared imaging, microbolometers, zinc oxide, atomic layer deposition
Kaynak
Optical Engineering
WoS Q Değeri
Q4
Scopus Q Değeri
Q2
Cilt
56
Sayı
3
