Single layer microbolometer detector pixel using ZnO material

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dc.contributor.authorTanrikulu, M. Yusuf
dc.contributor.authorYildizak, Cigdem
dc.contributor.authorOkyay, Ali K.
dc.contributor.authorAkar, Orhan
dc.contributor.authorSarac, Adem
dc.contributor.authorAkin, Tayfun
dc.date.accessioned2025-01-06T17:44:22Z
dc.date.available2025-01-06T17:44:22Z
dc.date.issued2018
dc.descriptionConference on Infrared Technology and Applications XLIV -- APR 16-19, 2018 -- Orlando, FL
dc.description.abstractThis paper presents the development of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD coated ZnO material, it can be used both as structural and active layers in microbolometer detectors. The design, simulations, and the fabrication optimization of 35. m single layer ZnO microbolometers are shown in this study. The designed pixel has a thermal conductance of 3.4x10(-7) W/K and a thermal time constant of 1.34 ms while it has a maximum displacement of 0.43 mu m under 1000g acceleration. This structure can be used to decrease the design complexities and fabrication costs and increase the yield of the detectors making them possible to be used in low-cost applications.
dc.description.sponsorshipSPIE
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [114E645]; Scientific Research Project Unit of Adana Science and Technology University [16103011]
dc.description.sponsorshipThis work has been supported by The Scientific and Technological Research Council of Turkey (TUBITAK) with project number 114E645 and Scientific Research Project Unit of Adana Science and Technology University with project number 16103011.
dc.identifier.doi10.1117/12.2302996
dc.identifier.isbn978-1-5106-1760-5
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.scopus2-s2.0-85050683445
dc.identifier.scopusqualityQ4
dc.identifier.urihttps://doi.org/10.1117/12.2302996
dc.identifier.urihttps://hdl.handle.net/20.500.14669/3025
dc.identifier.volume10624
dc.identifier.wosWOS:000453081800036
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherSpie-Int Soc Optical Engineering
dc.relation.ispartofInfrared Technology and Applications Xliv
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_20241211
dc.subjectSingle layer
dc.subjectatomic layer deposition
dc.subjectZnO
dc.subjectmicrobolometer
dc.titleSingle layer microbolometer detector pixel using ZnO material
dc.typeConference Object

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