Atomic-layer-deposited zinc oxide as tunable uncooled infrared microbolometer material

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dc.authoridBolat, Sami/0000-0001-7656-0061
dc.authoridTANRIKULU, M. Yusuf/0000-0001-7956-1289
dc.contributor.authorBattal, Enes
dc.contributor.authorBolat, Sami
dc.contributor.authorTanrikulu, M. Yusuf
dc.contributor.authorOkyay, Ali Kemal
dc.contributor.authorAkin, Tayfun
dc.date.accessioned2025-01-06T17:36:30Z
dc.date.available2025-01-06T17:36:30Z
dc.date.issued2014
dc.description.abstractZnO is an attractive material for both electrical and optical applications due to its wide bandgap of 3.37eV and tunable electrical properties. Here, we investigate the application potential of atomic-layer-deposited ZnO in uncooled microbolometers. The temperature coefficient of resistance is observed to be as high as -10.4%K-1 near room temperature with the ZnO thin film grown at 120 degrees C. Spectral noise characteristics of thin films grown at various temperatures are also investigated and show that the 120 degrees C grown ZnO has a corner frequency of 2kHz. With its high TCR value and low electrical noise, atomic-layer-deposited (ALD) ZnO at 120 degrees C is shown to possess a great potential to be used as the active layer of uncooled microbolometers. The optical properties of the ALD-grown ZnO films in the infrared region are demonstrated to be tunable with growth temperature from near transparent to a strong absorber. We also show that ALD-grown ZnO can outperform commercially standard absorber materials and appears promising as a new structural material for microbolometer-based applications.
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [109E044, 112M004, 112E052, 113M815, 113M912]; FP7 Marie Curie IRG grant [239444]; TUBITAK-BIDEB
dc.description.sponsorshipThis work was supported by the Scientific and Technological Research Council of Turkey (TUBITAK), grant numbers 109E044, 112M004, 112E052, 113M815, and 113M912, FP7 Marie Curie IRG grant 239444. A. K. O. acknowledges a Marie Curie International Reintegration Grant (IRG). E. B and S. B. are supported by TUBITAK-BIDEB MS fellowships.
dc.identifier.doi10.1002/pssa.201431195
dc.identifier.endpage2482
dc.identifier.issn1862-6300
dc.identifier.issn1862-6319
dc.identifier.issue11
dc.identifier.scopus2-s2.0-84927804326
dc.identifier.scopusqualityQ2
dc.identifier.startpage2475
dc.identifier.urihttps://doi.org/10.1002/pssa.201431195
dc.identifier.urihttps://hdl.handle.net/20.500.14669/1904
dc.identifier.volume211
dc.identifier.wosWOS:000344461800006
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherWiley-V C H Verlag Gmbh
dc.relation.ispartofPhysica Status Solidi A-Applications and Materials Science
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20241211
dc.subjectatomic layer deposition
dc.subjectbolometers
dc.subjectelectrical conduction
dc.subjectsemiconductors
dc.subjectthin films
dc.subjectZnO
dc.titleAtomic-layer-deposited zinc oxide as tunable uncooled infrared microbolometer material
dc.typeArticle

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