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Öğe Hexagonal Microbolometer Pixel for Flexible Substrates(IEEE, 2017) Yildizak, Cigdem; Tanrikulu, M. YusufNature becomes a source of inspiration to many researches on imaging systems. Imaging features owned by biological forms such as high resolution, wide field of view, high depth of field, high sensitivity to motion and light are attractive reasons to mimic the nature in imaging system applications. In this study, an arthropod eye's hexagonal shaped ommatidia are taken as a model for uncooled microbolometer pixel structure. A hexagonal pixel with 34 um diagonal length which has the thermal conductance value of 1.48x10(-7) W/K and the time constant value of 0.69 ms is designed for the first time in literature. The pixels are estimated to have an NETD of less than 250 mK in a potential 384x288 microbolometer array.Öğe Realization of Single Layer Microbolometer Detector Pixel Using ZnO Material(IEEE-Inst Electrical Electronics Engineers Inc, 2020) Tanrikulu, M. Yusuf; Yildizak, Cigdem; Okyay, Ali K.; Akar, Orhan; Sarac, Adem; Akin, TayfunThis paper presents the realization of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD coated ZnO material, it can be used both as structural and active layers in microbolometer detectors. The design, simulations, and the fabrication optimization of two types of single layer ZnO microbolometer having pixel pitch of 35 mu m are shown in this study. The designed pixels have thermal conductances of 58 nW/K and 476 nW/K while their thermal time constant values are 1.62 ms and 0.24 ms. The temperature coefficient of resistance and 1/f corner frequency of fabricated resistors are measured to be -10 %/K and 302.5 Hz respectively. The absorption coefficients of both pixels are measured to be around 40 % in 8-12 mu m wavelength range. The fabricated pixels are the first examples of successfully obtained single layer ZnO microbolometer pixels in literature and the proposed structures can be used to decrease the design complexities and fabrication costs and increase the yield of the detectors making them possible to be used in low-cost applications.Öğe Single layer microbolometer detector pixel using ZnO material(Spie-Int Soc Optical Engineering, 2018) Tanrikulu, M. Yusuf; Yildizak, Cigdem; Okyay, Ali K.; Akar, Orhan; Sarac, Adem; Akin, TayfunThis paper presents the development of a single layer microbolometer pixel fabricated using only ZnO material coated with atomic layer deposition. Due to the stress-free nature and high temperature coefficient of resistance of the ALD coated ZnO material, it can be used both as structural and active layers in microbolometer detectors. The design, simulations, and the fabrication optimization of 35. m single layer ZnO microbolometers are shown in this study. The designed pixel has a thermal conductance of 3.4x10(-7) W/K and a thermal time constant of 1.34 ms while it has a maximum displacement of 0.43 mu m under 1000g acceleration. This structure can be used to decrease the design complexities and fabrication costs and increase the yield of the detectors making them possible to be used in low-cost applications.