Poyraz, MuhammetGorgulu, KazimSisman, ZulkarneynTanrikulu, Mahmud YusufOkyay, Ali Kemal2025-01-062025-01-0620170091-32861560-230310.1117/1.OE.56.3.0371062-s2.0-85015781609https://doi.org/10.1117/1.OE.56.3.037106https://hdl.handle.net/20.500.14669/3161We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)eninfo:eu-repo/semantics/closedAccessuncooled infrared imagingmicrobolometerszinc oxideatomic layer depositionArticle3Q256WOS:000397207200068Q4