dc.contributor.author |
Tanrikulu, Mahmud Yusuf |
|
dc.contributor.author |
Rasouli, Hamid Reza |
|
dc.contributor.author |
Ghaffari, Mohammad |
|
dc.contributor.author |
Topalli, Kagan |
|
dc.contributor.author |
Okyay, Ali Kemal |
|
dc.date.accessioned |
2019-11-12T11:31:51Z |
|
dc.date.available |
2019-11-12T11:31:51Z |
|
dc.date.issued |
2016-05 |
|
dc.identifier.citation |
Tanrikulu, M. Y., Rasouli, H. R., Ghaffari, M., Topalli, K., & Okyay, A. K. (2016). Atomic layer deposition synthesized TiOx thin films and their application as microbolometer active materials. Journal of Vacuum Science & Technology A, 34(3), 031510. https://doi.org/10.1116/1.4947120 |
tr_TR |
dc.identifier.issn |
0734-2101 |
|
dc.identifier.issn |
1520-8559 |
|
dc.identifier.uri |
http://openaccess.adanabtu.edu.tr:8080/xmlui/handle/123456789/547 |
|
dc.identifier.uri |
https://doi.org/10.1116/1.4947120 |
|
dc.description |
WOS indeksli yayınlar koleksiyonu. / WOS indexed publications collection. |
|
dc.description.abstract |
This paper demonstrates the possible usage of TiOx thin films synthesized by atomic layer deposition as a microbolometer active material. Thin film electrical resistance is investigated as a function of thermal annealing. It is found that the temperature coefficient of resistance values can be controlled by coating/annealing processes, and the value as high as -9%/K near room temperature is obtained. The noise properties of TiOx films are characterized. It is shown that TiOx films grown by atomic layer deposition technique could have a significant potential to be used as a new active material for microbolometer-based applications. |
tr_TR |
dc.language.iso |
en |
tr_TR |
dc.publisher |
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A / A V S AMER INST PHYSICS |
tr_TR |
dc.relation.ispartofseries |
2016;Volume: 34 Issue: 3 |
|
dc.subject |
ANATASE |
tr_TR |
dc.subject |
OXIDE |
|
dc.subject |
XPS |
|
dc.subject |
Materials Science |
|
dc.subject |
Coatings & Films |
|
dc.subject |
Physics |
|
dc.subject |
Applied |
|
dc.title |
Atomic layer deposition synthesized TiOx thin films and their application as microbolometer active materials |
tr_TR |
dc.type |
Article |
tr_TR |