Poyraz, Muhammet; Gorgulu, Kazim; Sisman, Zulkarneyn; Tanrikulu, Mahmud Yusuf; Okyay, Ali Kemal
(OPTICAL ENGINEERING / SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 2017-03)
We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high ...