Kesim, Yunus Emre; Battal, Enes; Tanrikulu, M. Yusuf; Okyay, Ali K.
(INFRARED PHYSICS & TECHNOLOGY / ELSEVIER SCIENCE BV, 2014-11)
Microbolometers are extensively used for uncooled infrared imaging applications. These imaging units generally employ vanadium oxide or amorphous silicon as the active layer and silicon nitride as the absorber layer. ...