Tanrikulu, Mahmud Yusuf; Rasouli, Hamid Reza; Ghaffari, Mohammad; Topalli, Kagan; Okyay, Ali Kemal
(JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A / A V S AMER INST PHYSICS, 2016-05)
This paper demonstrates the possible usage of TiOx thin films synthesized by atomic layer deposition as a microbolometer active material. Thin film electrical resistance is investigated as a function of thermal annealing. ...